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UHP Regulator (High Pressuere)

HSME

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RG1 Series
Designed for point-of-use medium flow to be used in process gas cabinets for gas companies,
equipment manufactures and semiconductor manufacturers.
Precise control of gas pressure at or near the process tool for flow rates of up to 250 SLPM at 300 PSIG inlet.
All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment.
Metal-to-metal diaphragm seals provide enhanced leak tight integrity.
Every step of assembly, welding, testing and final cleaning finished in Class 100 or 10 Cleanrooms
       
 Specifications
 Fluid Media      
All gases corrosive or non-corrosive or those requiring high purity regulation
compatible with materials of construction. For other media, consult with factory.
 Pressure Rating   Per criteria of ANSI / ASME B31.3.
Max. rated inlet pressure :3500 or 600 PSIG (241 or 41 bar)
Outlet pressure ranges :1-30, 1-60, 1-100, 1-150 or 1-250 PSIG
(.1-2.1, .1-4.1, .1-6.9, .1-10.3 or .1-17.3bar)
  Design proof pressure : 150% of Maximum rated pressure
 Materials in Contact with Media     
Body :316L Stainless Steel with BA, Electropolish
Outlet pressure ranges :PCTFE (Vespel optional for 3500 PSIG model only)
Diaphragm :Hastelloy C-22
  Spring, valve stem and valve bush :316L Stainless Steel
 Other Parameters     
Flow coefficient :Cv=0.06(3500 PSIG model), Cv=0.2(600 PSIG model)
Certified maximum inboard leak rate :1X10-9 atm cc/sec He
Internal surface finish :10Ra or 5Ra microinch(.25 or .13 micrometer)
Operating temperature :
PCTFE seat-15  to + 176 (-26  to +80 )
Vespel seat-15  to + 350 (-26  to +177)
Weight (w/o gauges) :2.0lbs.(.9kg)
       
 Ordering Information

 

 

 (1) Material   H = 1/4 Female Face Seal (Fig. D) 
 S = 316L Stainless Steel Sigle Melted   I = 1/4 Female Face Seal (Fig. C) 
 D = 316L Stainless Steel Double Melted J = 1/4 Female Face Seal (Fig. B) 
  (2) Connection Size  K = 1/4 Fixed Male Face Seal (Fig. B) 
 4 = 1/4   L = 1/4 Fixed Male Face Seal (Fig. C) 
 (3) Product   M = 1/4 Fixed Male Face Seal (Fig. D) 
 RG1 Series   N = 1/4 Female NPT Thread (Fig.B) 
 (4) Connection Type  O = 1/4 Female NPT Thread (Fig.C) 
 NF = Female NPT Thread  P = 1/4 Female NPT Thread (Fig.D) 
 SW = Compression Lok Fitting  (8) Outlet Pressure Range 
 TW = Tube Butt Weld  0 = 1~ 30 psig  
 VF = Female Type Face Seal  1 = 1~ 60 psig  
 VM = Male Type Face Seal  2 = 1~100 psig  
 VMF = Fixed Male Type Face Seal 3 = 1~250 psig  
 (5) Maximum Inlet Pressure  4 = 1~150 psig  
 1 = 3500 psig   (9) Maximum Range of Outlet Gauge
 2 = 600 psig   0 = 30 psig  
 (6) Maximum Range of Inlet Gaugeure 1 = 60 psig  
 1 = 600 psig        2 = 1000 psig  2 = 100 psig  
 3 = 3500 psig      4 = 4000 psig  3 = 160 psig  
 Blank = No Gauge  4 = 200 psig  
 (7) Gauge Port Configuration  5 = 300 psig  
 A = No Gauge Port (Fig. A)  Blank = No Gauge  
 B = 1/4 Internal Face Seal (Fig. C) (10) User Option  
 C = 1/4 Internal Face Seal (Fig. B) Customization 
 D = 1/4 Internal Face Seal (Fig. D) (11)   Grade  
 E = 1/4 Male Face Seal (Fig. D)  Blank = BA Standard (10 Ra in) 
 F = 1/4 Male Face Seal (Fig. C)  P = Electropolishing (5 Ra in) 
 G = 1/4 Male Face Seal (Fig. B)  PX = Electropolishing (5 Ra in) 

 

 

 

 

 

 

 Ordering No.

Material

Conection

 Max Inlet Pressure

 Max Outlet Pressure Range

Grade

S4RG1-VF-13C35-P

 316L Stainless Steel Sigle Melted

1/4" F.VCR

3500 Psig

1~250 Psig

EP

 

 

  

  
Product Details
Product UHP Regulator (High Pressuere)
Manufacturer TK SCT
Country of Origin Republic of Korea
Price 견적가
Product Code P00000ES
Domestic / International Shipping oversea delivery
Shipping (Charge) International Shipping Fee
Payment for Shipping Parcel Service
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  • Shipping Time : 3 - 7 days
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